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Vacuum Technology

Flanges and Fittings

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Vacuum Gauges & Transducers

In-Stock! - Vacuum Gauges Available for Immediate Delivery

Heated Lines and Process Solutions

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HPS® Vacuum Technology
vacuum components, valves, gauges, transducers, heated lines, process components,
custom products, & subsystems.

HPS® Products manufactures a complete range of vacuum components, vacuum valves, and vacuum gauges. Between the process tool and the scrubber, our vacuum components offer solutions to system contamination, system downtime, space constraints and outgassing. HPS vacuum components are used in medium to high vacuum systems, downstream from the process chamber, where leak integrity and cleanliness are critical to good process results. HPS vacuum gauges, valves, and stainless steel pipes and fittingsOur series of vacuum foreline heaters and traps prevent the build-up of condensable gases that could be deposited near the process chamber and that clog pumping lines. With precise control of the temperature in the vacuum line, condensates are directed to traps that are designed to protect the downstream pumping systems.

HPS vacuum gauges are well known in applications requiring indirect pressure measurement throughout the vacuum range. These gauges and transducers use various ionization and thermal conductivity technologies integrated with easy-to-use electronics for control and display.

HPS Products also offers a line of clamp fittings and buttweld components designed and manufactured for the biotechnology and pharmaceutical processing industries. These components can be used in any liquid flow process or high purity utility application where cleanability, sterility, dimensional integrity, and materials of construction are critical.

Documents

MKS Instruments Vacuum Component Product Line

Frequently Asked Questions from MKS Instruments Vacuum Technology Group

Semiconductor Processing Key Component Solutions Through The 100nm Era

Small Changes Boost Vacuum Productivity
 

Need help?

Contact an Application Specialist by sending an email to MKS Vacuum Technology or call 303-449-9861.

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