HPS® Vacuum Technology
vacuum components, valves, gauges, transducers, heated lines, process components,
custom products, & subsystems.
HPS® Products manufactures a complete range of vacuum components, vacuum valves, and vacuum gauges. Between the process tool and the scrubber, our vacuum components offer solutions to system contamination, system downtime, space constraints and outgassing. HPS vacuum components are used in medium to high vacuum systems, downstream from the process chamber, where leak integrity and cleanliness are critical to good process results.
Our series of vacuum foreline heaters and traps prevent the build-up of condensable gases that could be deposited near the process chamber and that clog pumping lines. With precise control of the temperature in the vacuum line, condensates are directed to traps that are designed to protect the downstream pumping systems.
HPS vacuum gauges are well known in applications requiring indirect pressure measurement throughout the vacuum range. These gauges and transducers use various ionization and thermal conductivity technologies integrated with easy-to-use electronics for control and display.
HPS Products also offers a line of clamp fittings and buttweld components designed and manufactured for the biotechnology and pharmaceutical processing industries. These components can be used in any liquid flow process or high purity utility application where cleanability, sterility, dimensional integrity, and materials of construction are critical.